JPH02108340U - - Google Patents
Info
- Publication number
- JPH02108340U JPH02108340U JP1675389U JP1675389U JPH02108340U JP H02108340 U JPH02108340 U JP H02108340U JP 1675389 U JP1675389 U JP 1675389U JP 1675389 U JP1675389 U JP 1675389U JP H02108340 U JPH02108340 U JP H02108340U
- Authority
- JP
- Japan
- Prior art keywords
- wafer mounting
- refrigerant
- disk body
- refrigerant passages
- refrigerant passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003507 refrigerant Substances 0.000 claims description 11
- 238000001816 cooling Methods 0.000 claims description 2
- 230000002093 peripheral effect Effects 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
- 238000012856 packing Methods 0.000 description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1675389U JPH02108340U (en]) | 1989-02-14 | 1989-02-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1675389U JPH02108340U (en]) | 1989-02-14 | 1989-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02108340U true JPH02108340U (en]) | 1990-08-29 |
Family
ID=31229953
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1675389U Pending JPH02108340U (en]) | 1989-02-14 | 1989-02-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02108340U (en]) |
-
1989
- 1989-02-14 JP JP1675389U patent/JPH02108340U/ja active Pending